Chong Cheong Wei, Muhammad Yahaya and Muhamad Mat Salleh
Institue of Microengineering and Nanoelectronics,
Polycrystalline Bi-Ti-O thin film was prepared by multilayer deposition method using electron beam evaporation. The thin film was obtained by sequentially evaporating Bi2O3 / TiO2 layers on Si / SiO2 / Ti / Pt substrate followed by annealing for 30 minutes in air at 850 OC. A pressure sensor was fabricated by depositing Al film electrode on the top of the annealed multilayer films. The piezoelectric response of the sensor was then measured by pneumatic loading method. It was found that the sensor was sensitive to the applied pressure and showed good repeatability. This study showed the potentiality to obtain Bi-Ti-O thin film pressure sensor by electron beam multilayer deposition.
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