Solid State Science and Technology, Vol. 15, No 1 (2007) 56-64

ISSN 0128-7389

Corresponding Author: talibria@sirim.my

64

EFFECT OF N2:H2 RATIO ON SURFACE MODIFICATIONS OF AISI 316

PLATES BY PLASMA NITRIDING PROCESS

 

R.J. Taliba, A.H. Hashima, M.Z. Abdullaha and S. M Yunusb

aAMREC, SIRIM Bhd,.Lot 34, Jalan Hi-Tech 2/3

Kulim Hi-Tech Park, 09000 KULIM, Malaysia

 

bDepartment of Mechanical Engineering

University of Malaya, Kuala Lumpur

 

ABSTRACT

Plasma nitriding is used for improving the tribomechanical and chemical properties of

the engineering components. In this study, plasma nitriding of AISI 316 substrate has

been carried out using microwave plasma enhanced chemical vapour deposition

(MPECVD) process by varying the nitrogen and hydrogen ratios. (90:10, 80:20, 70:30,

60:40). Whereas the other deposition parameters such as power, temperature, pressure,

deposition duration were kept constant. After deposition process, each sample was then

subjected to hardness test, atomic force measurement and microstructural examination.

The effect of N2:H2 ratio on the mechanical and tribological characteristics of AISI

plasma nitrated samples will be discussed in this paper.

 

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