Solid State Science and Technology, Vol. 15, No 1 (2007) 56-64
Corresponding Author: email@example.com
EFFECT OF N2:H2 RATIO ON SURFACE MODIFICATIONS OF AISI 316
PLATES BY PLASMA NITRIDING PROCESS
R.J. Taliba, A.H. Hashima, M.Z. Abdullaha and S. M Yunusb
aAMREC, SIRIM Bhd,.Lot 34, Jalan Hi-Tech 2/3
Kulim Hi-Tech Park, 09000 KULIM, Malaysia
bDepartment of Mechanical Engineering
University of Malaya, Kuala Lumpur
Plasma nitriding is used for improving the tribomechanical and chemical properties of
the engineering components. In this study, plasma nitriding of AISI 316 substrate has
been carried out using microwave plasma enhanced chemical vapour deposition
(MPECVD) process by varying the nitrogen and hydrogen ratios. (90:10, 80:20, 70:30,
60:40). Whereas the other deposition parameters such as power, temperature, pressure,
deposition duration were kept constant. After deposition process, each sample was then
subjected to hardness test, atomic force measurement and microstructural examination.
The effect of N2:H2 ratio on the mechanical and tribological characteristics of AISI
plasma nitrated samples will be discussed in this paper.
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