Solid State Science and Technology, Vol. 15, No 2 (2007) 123-127

ISSN 0128-7389

SYNTHESIS OF CARBON NANOTUBES BY MICROWAVE ASSISTED PLASMA DEPOSITION (MAPCVD) TECHNIQUE

Abdul Hakim Hashim

Advanced Materials Research Center, Sirim Berhad

No 34, Jalan Hi Tech , Kulim High Tech Park

09000 Kulim Kedah

 

ABSTRACT

Microwave Plasma has been used to synthesise carbon nanotubes (CNT) in the hydrogen and methane environment on the Si substrate. RF sputtering is used for applying nickel catalyst surface of the substrate. Scanning Electron Microscope (SEM) analysis revealed the formation of tubular structure of the deposits, while High Resolution Transmission Electron Microscope (HRTEM) analysis revealed the structure of multiwalled CNT.

 

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